Abstract:Utilizing technological innovation to lead the construction of a modern industrial system is a strategic choice for seizing the opportunities of the new round of technological revolution and industrial transformation. It is also a necessary step for winning the strategic initiative towards high-level self-reliance and self-improvement. Technological innovation is the intrinsic driving force behind industrial innovation, and industrial innovation is the value embodiment of technological innovation. The deep integration of technological innovation and industrial innovation is the key to constructing and improving a modern industrial system. Taking the global extreme ultra-violet (EUV) lithography system as an example, based on the perspective of the innovation chain, this study explores the breakthrough of EUV lithography system from four stages: applied basic research–applied research–pilot scale-up–large scale production. It refines the process of the formation of closely dynamic deep integration of technological innovation and industrial innovation from aspects such as diversified main bodies collaborating to strengthen application-oriented technological innovation supply to enhance the advancement of the technical system, leading enterprises leading to break through the industrial chain resources to promote the integrity of the supply system, and innovative institutional design ensuring the output transformation of achievements to enhance the dynamic nature of the innovation system. This provides theoretical and practical insights for China to seize the commanding heights of global science and technology and build modern industrial systems, as well as develop new quality productivity.