Abstract:The technological advancement of ultra-precision equipment is highly dependent on the development of advanced highperformance materials. The preparation and processing techniques of key materials directly impact the performance and service behavior of ultra-precision equipment. Nevertheless, the shortcomings in high-performance materials have become major weaknesses in China’s high-end equipment manufacturing. This study systematically summarizes the application of advanced materials in ultraprecision equipment and provides an in-depth analysis of the current status of material preparation and processing technologies, and prospects for future development directions in this field are offered as well. Based on a thorough analysis of the main issues currently faced by China’s ultra-precision equipment material industry, the study proposes solutions and development strategies from both technical and policy perspectives, aiming to facilitate the deep integration of various advanced materials and manufacturing technologies, thereby promoting the optimization and upgrading of ultra-precision equipment manufacturing technology and enhancing the competitiveness of related industries.