封松林,王渭源,王跃林.微系统进展与我院微系统发展战略思考[J].中国科学院院刊,2003,(1):14-19.

封松林
上海微系统与信息技术研究所 上海200050
Feng Songlin
Shanghai Institute of Microsystemand Information Technology,CAS, 200050 Shanghai
王渭源
上海微系统与信息技术研究所 上海200050
Wang Wei yuan
Shanghai Institute of Microsystemand Information Technology,CAS, 200050 Shanghai
王跃林
上海微系统与信息技术研究所 上海200050
Wang Yuelin
Shanghai Institute of Microsystemand Information Technology,CAS, 200050 Shanghai

         微系统;进展;产业化;发展战略

        microsystem;evolution;industrialization;develop strategy

        微系统是指集成了微电子和微机械(或光学、化学、生物等方面的微元件)的系统。它以微米尺度理论为基础,用批量化的微电子技术和三维加工技术制造,用以完成信息获取、处理及执行的功能。阐述了国内外微系统技术及其产业发展的历程、现状和趋势,比较分析了我院微系统技术发展现状。基于以上分析讨论,提出了我院微系统发展战略。最后提出了对我院微系统产业发展的思考。

        Microsystem is defined as the system integrated with IC and micromachine or optics,chemistry and biology types of micro-units.The microsystem,which has the ability of both picking up,managing and executing of information,is based on micron scale theory,manufactured with the technique of IC and 3D processing.In this paper,the domestic and oversea develop course,evolution condition and trend of mircosystem technology and its industrialization was described in detail.Furthermore,the develop condition of the micorsys temtechnology of Chinese Academy of Sciences (CAS) was also discussed.Based on above description and discussion,the authors brought forward develop strategy of microsystem of CAS.Especially,in this paper the authors deeply analyzed the approach to the realization of microsys temtechnology’s industrialization in CAS.