Abstract:Microsystem is defined as the system integrated with IC and micromachine or optics,chemistry and biology types of micro-units.The microsystem,which has the ability of both picking up,managing and executing of information,is based on micron scale theory,manufactured with the technique of IC and 3D processing.In this paper,the domestic and oversea develop course,evolution condition and trend of mircosystem technology and its industrialization was described in detail.Furthermore,the develop condition of the micorsys temtechnology of Chinese Academy of Sciences (CAS) was also discussed.Based on above description and discussion,the authors brought forward develop strategy of microsystem of CAS.Especially,in this paper the authors deeply analyzed the approach to the realization of microsys temtechnology’s industrialization in CAS.