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修订日期:2025-05-15
修订日期:2025-05-15
中文摘要: 随着激光核聚变、空间对地观测、深空探测、极紫外光刻等关键领域的不断发展,对高面形精度、高表面质量光学元件需求的不断增加,先进光学超精密制造技术已成为国家高端制造领域的核心支柱。文章围绕光学元件的材料制备技术、超精密成形、抛光、检测及表面处理技术等方面,阐述了国内先进光学超精密制造技术的研究现状,分析了国内该领域存在的问题及应对措施,对先进光学超精密制造技术的下一个新阶段进行了展望,希望能引发该领域研究的一些思考。
Abstract:With the continuous development of key fields such as laser nuclear fusion, space-to-earth observation, deep space exploration, and extreme ultraviolet lithography, the demand for optical components with high surface shape accuracy and high surface quality is increasing. Advanced optical ultra-precision manufacturing technology has become the core pillar of the national high-end manufacturing field. In this paper, the research status of advanced optical ultra-precision manufacturing technology in China is described with the focus on material preparation technology of optical components, ultra-precision forming, polishing, testing and surface treatment technology of components. The existing problems and countermeasures in this field in China are analyzed. Finally, the new stage of advanced optical ultra-precision manufacturing technology is prospected, hoping to lead to some thinking in this field.
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张鑫,海阔,李资政,张瀛怀,张斌智,张云飞,臧仲明,曾鹏,吴明涛,李凯隆,闫力松,陈太喜,钱宜刚,焦宏飞.先进光学超精密制造技术现状、问题与建议[J].中国科学院院刊,2025,40(5):870-878.
ZHANG Xin,HAI Kuo,LI Zizheng,ZHANG Yinghuai,ZHANG Binzhi,ZHANG Yunfei,ZANG Zhongming,ZENG Peng,WU Mingtao,LI Kailong,YAN Lisong,CEHN Taixi,QIAN Yigang,JIAO Hongfei.Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology[J].Bulletin of Chinese Academy of Sciences,2025,40(5):870-878.
张鑫,海阔,李资政,张瀛怀,张斌智,张云飞,臧仲明,曾鹏,吴明涛,李凯隆,闫力松,陈太喜,钱宜刚,焦宏飞.先进光学超精密制造技术现状、问题与建议[J].中国科学院院刊,2025,40(5):870-878.
ZHANG Xin,HAI Kuo,LI Zizheng,ZHANG Yinghuai,ZHANG Binzhi,ZHANG Yunfei,ZANG Zhongming,ZENG Peng,WU Mingtao,LI Kailong,YAN Lisong,CEHN Taixi,QIAN Yigang,JIAO Hongfei.Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology[J].Bulletin of Chinese Academy of Sciences,2025,40(5):870-878.