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DOI:10.3724/j.issn.1000-3045.20250502001
中国科学院院刊:2025,40(5):870-878
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先进光学超精密制造技术现状、问题与建议
张鑫1, 海阔2, 李资政3, 张瀛怀1, 张斌智1, 张云飞2, 臧仲明2, 曾鹏2, 吴明涛2, 李凯隆2, 闫力松4, 陈太喜1, 钱宜刚5, 焦宏飞6
(1.季华实验室(先进制造科学与技术广东省实验室) 佛山 528200;2.中国工程物理研究院机械制造工艺研究所 成都 610200;3.中山大学 物理与天文学院 珠海 519082;4.华中科技大学 光学与电子信息学院 武汉 430074;5.中天科技有限公司 南通 226009;6.同济大学 物理科学与工程学院 上海 200092)
Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology
ZHANG Xin1, HAI Kuo2, LI Zizheng3, ZHANG Yinghuai1, ZHANG Binzhi1, ZHANG Yunfei2, ZANG Zhongming2, ZENG Peng2, WU Mingtao2, LI Kailong2, YAN Lisong4, CEHN Taixi1, QIAN Yigang5, JIAO Hongfei6
(1.Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China;2.Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China;3.School of Physics and Astronomy, Sun Yat-sen University, Zhuhai 519082, China;4.School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;5.Zhongtian Technology Co. Ltd., Nantong 226009, China;6.School of Physics Science and Engineering, Tongji University, Shanghai 200092, China)
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本文已被:浏览 1118次   下载 542次
    修订日期:2025-05-15
中文摘要: 随着激光核聚变、空间对地观测、深空探测、极紫外光刻等关键领域的不断发展,对高面形精度、高表面质量光学元件需求的不断增加,先进光学超精密制造技术已成为国家高端制造领域的核心支柱。文章围绕光学元件的材料制备技术、超精密成形、抛光、检测及表面处理技术等方面,阐述了国内先进光学超精密制造技术的研究现状,分析了国内该领域存在的问题及应对措施,对先进光学超精密制造技术的下一个新阶段进行了展望,希望能引发该领域研究的一些思考。
中文关键词: 光学元件  超精密制造  复杂曲面  全频段
Abstract:With the continuous development of key fields such as laser nuclear fusion, space-to-earth observation, deep space exploration, and extreme ultraviolet lithography, the demand for optical components with high surface shape accuracy and high surface quality is increasing. Advanced optical ultra-precision manufacturing technology has become the core pillar of the national high-end manufacturing field. In this paper, the research status of advanced optical ultra-precision manufacturing technology in China is described with the focus on material preparation technology of optical components, ultra-precision forming, polishing, testing and surface treatment technology of components. The existing problems and countermeasures in this field in China are analyzed. Finally, the new stage of advanced optical ultra-precision manufacturing technology is prospected, hoping to lead to some thinking in this field.
keywords: optical elements  ultra-precision manufacturing  complex surface  full frequency band
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张鑫1 季华实验室(先进制造科学与技术广东省实验室) 佛山 528200 
海阔2* 中国工程物理研究院机械制造工艺研究所 成都 610200 
李资政3 中山大学 物理与天文学院 珠海 519082 
张瀛怀1 季华实验室(先进制造科学与技术广东省实验室) 佛山 528200 
张斌智1 季华实验室(先进制造科学与技术广东省实验室) 佛山 528200 
张云飞2 中国工程物理研究院机械制造工艺研究所 成都 610200 
臧仲明2 中国工程物理研究院机械制造工艺研究所 成都 610200 
曾鹏2 中国工程物理研究院机械制造工艺研究所 成都 610200 
吴明涛2 中国工程物理研究院机械制造工艺研究所 成都 610200 
李凯隆2 中国工程物理研究院机械制造工艺研究所 成都 610200 
闫力松4 华中科技大学 光学与电子信息学院 武汉 430074 
陈太喜1 季华实验室(先进制造科学与技术广东省实验室) 佛山 528200 
钱宜刚5 中天科技有限公司 南通 226009 
焦宏飞6 同济大学 物理科学与工程学院 上海 200092 
Author NameAffiliation
ZHANG Xin1 Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China 
HAI Kuo2* Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China 
LI Zizheng3 School of Physics and Astronomy, Sun Yat-sen University, Zhuhai 519082, China 
ZHANG Yinghuai1 Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China 
ZHANG Binzhi1 Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China 
ZHANG Yunfei2 Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China 
ZANG Zhongming2 Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China 
ZENG Peng2 Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China 
WU Mingtao2 Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China 
LI Kailong2 Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China 
YAN Lisong4 School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China 
CEHN Taixi1 Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China 
QIAN Yigang5 Zhongtian Technology Co. Ltd., Nantong 226009, China 
JIAO Hongfei6 School of Physics Science and Engineering, Tongji University, Shanghai 200092, China 
引用文本:
张鑫,海阔,李资政,张瀛怀,张斌智,张云飞,臧仲明,曾鹏,吴明涛,李凯隆,闫力松,陈太喜,钱宜刚,焦宏飞.先进光学超精密制造技术现状、问题与建议[J].中国科学院院刊,2025,40(5):870-878.
ZHANG Xin,HAI Kuo,LI Zizheng,ZHANG Yinghuai,ZHANG Binzhi,ZHANG Yunfei,ZANG Zhongming,ZENG Peng,WU Mingtao,LI Kailong,YAN Lisong,CEHN Taixi,QIAN Yigang,JIAO Hongfei.Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology[J].Bulletin of Chinese Academy of Sciences,2025,40(5):870-878.
 
 
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